TY - JOUR AU - Jozwik, Michal AU - Wielgo, Krzysztof AU - Kozacki, Tomasz PY - 2011/09/29 Y2 - 2024/03/29 TI - Design and analysis of DOE-based microinterferometer JF - Photonics Letters of Poland JA - Photonics Lett. Pol. VL - 3 IS - 3 SE - Articles DO - 10.4302/photon. lett. pl.v3i3.241 UR - https://photonics.pl/PLP/index.php/letters/article/view/3-43 SP - pp. 122-124 AB - This paper describes the design and numerical study of a Twyman-Green microinterferometer based on Diffractive Optical Elements (DOEs). Its compact design allows to fabricate several interferometers in an array-like pattern on an optical wafer - with horizontal dimensions appropriately adapted to the tested structures. To prove the design concept of the proposed interferometer configuration a laboratory setup was realized. The first results of the interferometric measurements on an MEMS object are presented. <br /> <br />Full Text: <a class="file" href="/PLP/index.php/letters/article/view/3-43/180" target="_parent">PDF</a> <br /> <strong><br />References:</strong> <ol> <li>http://www.ict-smartiehs.eu <a href="http://www.ict-smartiehs.eu">[DirectLink]</a></li> <li> M. Kujawinska et al., "Design, technology, and signal processing for DOE-based microinterferometer array applied in new generation M(O)EMS test equipment", Proc. SPIE 7791, 779103 (2010).<a href="http://dx.doi.org/10.1117/12.862170">[CrossRef]</a></li> <li>T. Kozacki et al., "Reconstruction of refractive-index distribution in off-axis digital holography optical diffraction tomographic system", Opt. Exp. 17, 13758 (2006). <a href="http://dx.doi.org/10.1364/OE.17.013758">[CrossRef]</a></li> <li>B. Kim et al., "Scanning Grating Microinterferometer for MEMS Metrology", J. Manuf. Sci. Eng. 126, 807 (2004). <a href="http://dx.doi.org/10.1115/1.1812773">[CrossRef]</a></li> <li>R.C. Rumpf, PhD Thesis, College of Optics / CREOL&FPCE (2006). </li> <li>M.G. Moharam et al., "Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings", J. Opt. Soc. Am. A 12, 1068 (1995). <a href="http://dx.doi.org/10.1364/JOSAA.12.001068">[CrossRef]</a></li> <li>P. Lalanne, M. Morris, "Highly improved convergence of the coupled-wave method for TM polarization", J. Opt. Soc. Am. A 13, 779 (1996). <a href="http://dx.doi.org/10.1364/JOSAA.13.000779">[CrossRef]</a></li> <li>V.A. Soifer, Methods for computer design of diffractive optical elements (New York, John Wiley & Sons 2002).</li> <li>D. Dias et al., "High-frequency gratings for applications to DVD pickup systems", J. Opt. A 3(3), 164 (2001). <a href="http://dx.doi.org/10.1088/1464-4258/3/3/302">[CrossRef]</a></li> </ol> ER -