GIEROWSKI, Jakub; PAWŁOWSKA, Sandra. Surface quality control of thin SiN layer by optical measurements. Photonics Letters of Poland, [S. l.], v. 13, n. 3, p. 61–63, 2021. DOI: 10.4302/plp.v13i3.1096. Disponível em: https://photonics.pl/PLP/index.php/letters/article/view/13-21. Acesso em: 24 apr. 2024.