NOWAK, Krzysztof M. Solid-state seeded nano-second pulse CO2 oscillator for extreme ultraviolet lithography. Photonics Letters of Poland, [S. l.], v. 5, n. 3, p. pp. 97–99, 2013. DOI: 10.4302/photon. lett. pl.v5i3.419. Disponível em: https://photonics.pl/PLP/index.php/letters/article/view/5-35. Acesso em: 20 apr. 2024.