Kujawinska, Malgorzata, Kay Gastinger, Michal Jozwik, Karl Henrik Haugholt, Christoph Schaeffel, and Stefan Beer. “An Interferometric Test Station for Massive Parallel Inspection of MEMS and MOEMS”. Photonics Letters of Poland 1, no. 2 (June 29, 2009): pp. 58–60. Accessed April 27, 2024. https://photonics.pl/PLP/index.php/letters/article/view/1-20.