Nowak, Krzysztof M. “Solid-State Seeded Nano-Second Pulse CO2 Oscillator for Extreme Ultraviolet Lithography”. Photonics Letters of Poland 5, no. 3 (September 26, 2013): pp. 97–99. Accessed April 24, 2024. https://photonics.pl/PLP/index.php/letters/article/view/5-35.