1.
Kujawinska M, Gastinger K, Jozwik M, Haugholt KH, Schaeffel C, Beer S. An interferometric test station for massive parallel inspection of MEMS and MOEMS. Photonics Lett. Pol. [Internet]. 2009 Jun. 29 [cited 2024 Mar. 29];1(2):pp. 58-60. Available from: https://photonics.pl/PLP/index.php/letters/article/view/1-20