Rib waveguides based on the sol-gel derived SiO2 :TiO2 films

Paweł Karasiński, Cuma Tyszkiewicz, Roman Rogoziński

Abstract


This work presents rib waveguides fabricated by chemical etching of inorganic two-component SiO2:TiO2 films. Silica-titania films were fabricated using sol-gel method. In all technological processes involving masking, standard photolithographic procedures were used. A photoresist was used as a mask in the chemical etching processes. Rib waveguides of 5 nm rib height and rib width of less than 4μm were single mode for a wavelength of λ=635nm. The attenuation determined for fabricated rib waveguides approximately equal to 1,5dB/cm.

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References:
  1. P. Karasiński, R. Rogoziński, "Rib waveguides fabricated by means of chemical etching of sol-gel films SiO2:TiO2", Optics Communications 245, 237-242 (2005).[CrossRef]
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Photonics Letters of Poland - A Publication of the Photonics Society of Poland
Published in cooperation with SPIE

ISSN: 2080-2242