Simultaneous shape measurement and layers detection by means of low coherence interferometry and optical coherence tomography

Slawomir Tomczewski, Anna Pakula, Leszek Salbut


In this paper authors show the application of low coherence interferometry and optical coherence tomography with non-Gaussian light source, which are applicable in simultaneous measurement of micromembrane and detection of layers deposited on silicon wafer. The exemplary measurement results obtained with laboratory setup are presented.

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Photonics Letters of Poland - A Publication of the Photonics Society of Poland
Published in cooperation with SPIE

ISSN: 2080-2242