Simultaneous shape measurement and layers detection by means of low coherence interferometry and optical coherence tomography

Authors

  • Slawomir Tomczewski Warsaw Univ. of Technology
  • Anna Pakula Warsaw Univ. of Technology
  • Leszek Salbut Warsaw Univ. of Technology

DOI:

https://doi.org/10.4302/photon.%20lett.%20pl.v4i2.300

Abstract

In this paper authors show the application of low coherence interferometry and optical coherence tomography with non-Gaussian light source, which are applicable in simultaneous measurement of micromembrane and detection of layers deposited on silicon wafer. The exemplary measurement results obtained with laboratory setup are presented.

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References
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Author Biography

Slawomir Tomczewski, Warsaw Univ. of Technology

PhD student at Institute of Micromechanics and Photonics, Warsaw University of Technology, 8 Sw. A. Boboli St., 02-525 Warsaw.

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Published

2012-06-27

How to Cite

Tomczewski, S., Pakula, A., & Salbut, L. (2012). Simultaneous shape measurement and layers detection by means of low coherence interferometry and optical coherence tomography. Photonics Letters of Poland, 4(2), pp. 57–59. https://doi.org/10.4302/photon. lett. pl.v4i2.300

Issue

Vol. 4 No. 2 (2012)

Section

Articles

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