Simultaneous shape measurement and layers detection by means of low coherence interferometry and optical coherence tomography
DOI:
https://doi.org/10.4302/photon.%20lett.%20pl.v4i2.300Abstract
In this paper authors show the application of low coherence interferometry and optical coherence tomography with non-Gaussian light source, which are applicable in simultaneous measurement of micromembrane and detection of layers deposited on silicon wafer. The exemplary measurement results obtained with laboratory setup are presented.Full Text: PDF
References
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Published
2012-06-27
How to Cite
Tomczewski, S., Pakula, A., & Salbut, L. (2012). Simultaneous shape measurement and layers detection by means of low coherence interferometry and optical coherence tomography. Photonics Letters of Poland, 4(2), pp. 57–59. https://doi.org/10.4302/photon. lett. pl.v4i2.300
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