Design and analysis of DOE-based microinterferometer

Authors

  • Michal Jozwik Warsaw University of Technology
  • Krzysztof Wielgo Warsaw University of Technology
  • Tomasz Kozacki Warsaw University of Technology

DOI:

https://doi.org/10.4302/photon.%20lett.%20pl.v3i3.241

Abstract

This paper describes the design and numerical study of a Twyman-Green microinterferometer based on Diffractive Optical Elements (DOEs). Its compact design allows to fabricate several interferometers in an array-like pattern on an optical wafer - with horizontal dimensions appropriately adapted to the tested structures. To prove the design concept of the proposed interferometer configuration a laboratory setup was realized. The first results of the interferometric measurements on an MEMS object are presented.

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References:
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Published

2011-09-29

How to Cite

[1]
M. Jozwik, K. Wielgo, and T. Kozacki, “Design and analysis of DOE-based microinterferometer”, Photonics Lett. Pol., vol. 3, no. 3, pp. pp. 122–124, Sep. 2011.

Issue

Vol. 3 No. 3 (2011)

Section

Articles

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